Physical Sciences › Génie / Ingénierie › Electrical and Electronic Engineering › Matériaux et dispositifs semi-conducteurs

Matériaux et dispositifs semi-conducteurs

This cluster of papers focuses on the advances in atomic layer deposition (ALD) technology, particularly in the context of high-k dielectrics, gate oxides, and semiconductor devices. It covers topics such as thin film growth, dielectric breakdown mechanisms, metal gate transistors, interface engineering, and the impact of negative bias temperature instability (NBTI) degradation on device performance.

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